Fraunhofer ENAS honored the development of technologies for 3D integration in MEMS applications with the Fraunhofer ENAS Research Award

Dr. Lutz Hofmann received the research award of Fraunhofer ENAS in 2018. With his research results on 3D integration and copper-filled through silicon vias in microsystems, he contributed to the expert status of the Fraunhofer Institute for Electronic Nano Systems ENAS in Chemnitz as one of the few ...